[go: up one dir, main page]

"The impact of process-induced mechanical stress in narrow width devices ..."

Naushad Alam, Bulusu Anand, Sudeb Dasgupta (2013)

Details and statistics

DOI: 10.1016/J.MICROREL.2013.01.004

access: closed

type: Journal Article

metadata version: 2020-02-22