Dual-source chemical vapour deposition of titanium sulfide thin films from tetrakisdimethylamidotitanium and sulfur precursors (Q60177941)

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scholarly article by Emily S. Peters et al published 2004 in Journal of Materials Chemistry

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Language	Label	Description	Also known as
English	Dual-source chemical vapour deposition of titanium sulfide thin films from tetrakisdimethylamidotitanium and sulfur precursors	scholarly article by Emily S. Peters et al published 2004 in Journal of Materials Chemistry

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scholarly article

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title

Dual-source chemical vapour deposition of titanium sulfide thin films from tetrakisdimethylamidotitanium and sulfur precursors (English)

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main subject

titanium

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thin film

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based on heuristic

inferred from title

author

Ivan P. Parkin

series ordinal

3

object named as

Ivan P. Parkin

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Claire J. Carmalt

series ordinal

2

object named as

Claire J. Carmalt

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author name string

Emily S. Peters

series ordinal

1

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publication date

2004

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published in

Journal of Materials Chemistry

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volume

14

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issue

23

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page(s)

3474

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Identifiers

DOI

10.1039/B410390D

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