Dual-source chemical vapour deposition of titanium sulfide thin films from tetrakisdimethylamidotitanium and sulfur precursors (Q60177941)

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scholarly article by Emily S. Peters et al published 2004 in Journal of Materials Chemistry
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Dual-source chemical vapour deposition of titanium sulfide thin films from tetrakisdimethylamidotitanium and sulfur precursors
scholarly article by Emily S. Peters et al published 2004 in Journal of Materials Chemistry

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    Dual-source chemical vapour deposition of titanium sulfide thin films from tetrakisdimethylamidotitanium and sulfur precursors (English)
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    Emily S. Peters
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    2004
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    14
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    23
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    3474
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