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Dina H. Triyoso
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2010 – 2019
- 2019
- [c8]U. Rana, D. P. Brunco, S. Raman, Dina H. Triyoso
, M. W. Stoker, Jeffrey B. Johnson, Luigi Pantisano, K. D. Seo, M. Zhao, A. Reznicek, R. Krishnan, B. Moser, J. Freeman, L. Jang, Evgeny Kaganer:
High Performance and Yield for Super Steep Retrograde Wells (SSRW) by Well Implant / Si-based Epitaxy on Advanced Technology FinFETs. DRC 2019: 251-252 - 2017
- [c7]D. H. Triyoso
Characterization of atomic layer deposited low-k spacer for FDSOI high-k metal gate transistor. ICICDT 2017: 1-4 - 2016
- [c6]D. H. Triyoso
Extending HKMG scaling on CMOS with FDSOI: Advantages and integration challenges. ICICDT 2016: 1-4 - [c5]Wenke Weinreich, Konrad Seidel, Patrick Polakowski, Maximilian Drescher, A. Gummenscheimer, Mark G. Nolan, L. Cheng, D. H. Triyoso
La-doped ZrO2 based BEoL decoupling capacitors. ICICDT 2016: 1-4 - 2014
- [c4]D. H. Triyoso
ALD Ta2O5 and Hf-doped Ta2O5 for BEOL compatible MIM. ICICDT 2014: 1-4 - [c3]Wenke Weinreich, Konrad Seidel, Patrick Polakowski, Stefan Riedel, Lutz Wilde, Dina H. Triyoso
ALD ZrO2 processes for BEoL device applications. ICICDT 2014: 1-4 - 2013
- [c2]Dina H. Triyoso
Impact of precursors choice on characteristics of PEALD SiN for spacer applications. ICICDT 2013: 69-72 - 2012
- [c1]D. H. Triyoso
Robust PEALD SiN spacer for gate first high-k metal gate integration. ICICDT 2012: 1-4
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