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"Technologies for Cofabricating MEMS and Electronics."

Gary K. Fedder et al. (2008)

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DOI: 10.1109/JPROC.2007.911064

access: closed

type: Journal Article

metadata version: 2022-10-02

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  - https://dblp.org/rec/journals/pieee/FedderHLQ08
Gary K. Fedder, Roger T. Howe, Tsu-Jae King Liu, Emmanuel P. Quevy:
Technologies for Cofabricating MEMS and Electronics. Proc. IEEE 96(2): 306-322 (2008)

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