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"A Novel High-Q Dual-Mass MEMS Tuning Fork Gyroscope Based on 3D ..."

Pengfei Xu et al. (2021)

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DOI: 10.3390/S21196428

access: open

type: Journal Article

metadata version: 2021-11-03

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  - journals/sensors/XuSHWJHNY21
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  - https://dblp.org/rec/journals/sensors/XuSHWJHNY21
Pengfei Xu, Chaowei Si, Yurong He, Zhenyu Wei, Lu Jia, Guowei Han, Jin Ning, Fuhua Yang:
A Novel High-Q Dual-Mass MEMS Tuning Fork Gyroscope Based on 3D Wafer-Level Packaging. Sensors 21(19): 6428 (2021)

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