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"Anomalous gate oxide conduction on isolation edges: analysis and process ..."

Andrea Ghetti et al. (2003)

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DOI: 10.1016/S0026-2714(03)00176-8

access: closed

type: Journal Article

metadata version: 2022-10-02

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Andrea Ghetti, D. Brazzelli, A. Benvenuti, G. Ghidini, Alessia Pavan:
Anomalous gate oxide conduction on isolation edges: analysis and process optimization. Microelectron. Reliab. 43(8): 1229-1235 (2003)

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