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"Feature-Based 3D Process Planning for MEMS Fabrication."

Satoshi Kanai, Takayuki Shibata, Takahiro Kawashima (2014)

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DOI: 10.20965/IJAT.2014.P0406

access: closed

type: Journal Article

metadata version: 2024-05-07

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Satoshi Kanai, Takayuki Shibata, Takahiro Kawashima:
Feature-Based 3D Process Planning for MEMS Fabrication. Int. J. Autom. Technol. 8(3): 406-419 (2014)

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