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"Positioning Characteristics of a MEMS Linear Motor Utilizing a Thin Film ..."

Ryogen Fujiwara, Tadahiko Shinshi, Minoru Uehara (2013)

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DOI: 10.20965/IJAT.2013.P0148

access: closed

type: Journal Article

metadata version: 2020-07-09

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  - journals/ijat/FujiwaraSU13
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  - https://dblp.org/rec/journals/ijat/FujiwaraSU13
Ryogen Fujiwara, Tadahiko Shinshi, Minoru Uehara:
Positioning Characteristics of a MEMS Linear Motor Utilizing a Thin Film Permanent Magnet and DLC Coating. Int. J. Autom. Technol. 7(2): 148-155 (2013)

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