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"Convolutional neural network based multi-input multi-output model for ..."

Jeongsub Choi et al. (2024)

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DOI: 10.1007/S10479-024-05902-Z

access: closed

type: Journal Article

metadata version: 2024-08-24

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  - https://dblp.org/rec/journals/anor/ChoiZKJ24
Jeongsub Choi, Mengmeng Zhu, Jihoon Kang, Myong K. Jeong:
Convolutional neural network based multi-input multi-output model for multi-sensor multivariate virtual metrology in semiconductor manufacturing. Ann. Oper. Res. 339(1-2): 185-201 (2024)

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