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"Investigation of fabricated Through Glass Via (TGV) process by inductively ..."

Yu-Hsiang Tang et al. (2015)

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DOI: 10.1109/NEMS.2015.7147453

access: closed

type: Conference or Workshop Paper

metadata version: 2020-09-14

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  - conf/nems/TangLHWSY15
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  - https://dblp.org/rec/conf/nems/TangLHWSY15
Yu-Hsiang Tang, Yu-Hsin Lin, Tsung-Tao Huang, Jun-Sheng Wang, Ming-Hua Shiao, Chih-Sheng Yu:
Investigation of fabricated Through Glass Via (TGV) process by inductively coupled plasma reactive ion etching of quartz glass. NEMS 2015: 401-404

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