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"A Flexible Cluster Tool Simulation Framework with Wafer Batch Dispatching ..."

Hsin-Ping Yen et al. (2023)

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DOI: 10.1109/ISQED57927.2023.10129375

access: closed

type: Conference or Workshop Paper

metadata version: 2023-06-01

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  dblp key:
  - conf/isqed/YenHLTKLCW23
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  - https://dblp.org/rec/conf/isqed/YenHLTKLCW23
Hsin-Ping Yen, Shiuan-Hau Huang, Yan-Hsiu Liu, Kuang-Hsien Tseng, Ji-Fu Kung, Yi-Ting Li, Yung-Chih Chen, Chun-Yao Wang:
A Flexible Cluster Tool Simulation Framework with Wafer Batch Dispatching Time Recommendation. ISQED 2023: 1-8

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