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"FinFET stressor efficiency on alternative wafer and channel orientations ..."

Geert Eneman et al. (2015)

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DOI: 10.1109/ICICDT.2015.7165898

access: closed

type: Conference or Workshop Paper

metadata version: 2024-10-06

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Geert Eneman, An De Keersgieter, Anda Mocuta, Nadine Collaert, Aaron Thean:
FinFET stressor efficiency on alternative wafer and channel orientations for the 14 nm node and below. ICICDT 2015: 1-4

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