default search action

combined dblp search
author search
venue search
publication search

ask others

"Correlation between Low Polarization and Roughness in Low-k SiOC Thin ..."

Teresa Oh (2011)

> Home

Details and statistics

DOI: 10.1007/978-3-642-27180-9_19

access: closed

type: Conference or Workshop Paper

metadata version: 2017-06-15

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - conf/fgit/Oh11
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/conf/fgit/Oh11
Teresa Oh:
Correlation between Low Polarization and Roughness in Low-k SiOC Thin Films by Chemical Vapor Deposition. FGIT-GDC 2011: 155-160

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.