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"Vibration control of a turbomolecular vacuum pump using piezoelectric ..."

Luigi Piroddi, Alberto Leva, Fausto Casaro (2006)

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DOI: 10.1109/CDC.2006.377707

access: closed

type: Conference or Workshop Paper

metadata version: 2020-07-08

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Luigi Piroddi, Alberto Leva, Fausto Casaro:
Vibration control of a turbomolecular vacuum pump using piezoelectric actuators. CDC 2006: 6555-6560

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