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"Self-dependent equivalent circuit modeling of electrostatic comb ..."

Toshiyuki Tsuchiya et al. (2011)

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DOI: 10.1109/VLSISOC.2011.6081639

access: closed

type: Conference or Workshop Paper

metadata version: 2019-10-19

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Toshiyuki Tsuchiya, Hiroyuki Tokusaki, Yoshikazu Hirai, Koji Sugano, Osamu Tabata:
Self-dependent equivalent circuit modeling of electrostatic comb transducers for integrated MEMS. VLSI-SoC 2011: 208-213

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