Energy deposition during molecular depth profiling experiments with cluster ion beams (Q36909616)
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scientific article published on 13 June 2008
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English | Energy deposition during molecular depth profiling experiments with cluster ion beams |
scientific article published on 13 June 2008 |
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Energy deposition during molecular depth profiling experiments with cluster ion beams (English)
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Joseph Kozole
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Andreas Wucher
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13 June 2008
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5293-5301
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