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Conferences > OFC > 2018 > M4F > M4F.3

Three Dimensional Silicon Optical Waveguide Structure Bent by Ion Implantation for Surface Coupling

Y. Sakakibara, Y. Atsumi, and T. Yoshida

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Abstract

Titled vertically bent structure with several-micrometers curving radii and a spot size conversion function enables efficient coupling between optical fibers and silicon photonic chips from the surface side with broad spectrum bandwidth and assembly tolerance.

© 2018 The Author(s)

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