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A321671 as a simple table

na(n)
13
25
37
413
523
629
731
837
947
1061
11101
12127
13229
14269
15431
16503
17509
18997
191021
201319
212039
223853
234093
247949
258111
268191
2714197
2816141
2916381
3032687
3145853
3265293
33130343
34130829
35131063
36131071
37347141
38502829
39524261
40524287
411028893
421046389
431048549

[3,5,7,13,23,29,31,37,47,61,101,127,229,269,431,
 503,509,997,1021,1319,2039,3853,4093,7949,8111,
 8191,14197,16141,16381,32687,45853,65293,130343,
 130829,131063,131071,347141,502829,524261,524287,
 1028893,1046389,1048549]