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<noinclude>'''Important: read the documentation before modifying this template.'''</noinclude>{{sidebar
| name         = Semiconductor manufacturing processes
| width        = auto
| title        = [[Semiconductor device fabrication|Semiconductor<br />device<br />fabrication]]
| titlestyle   = font-size: 110%
| image        = [[File:4-fach-NAND-C10.JPG|100px]]
| contentclass = plainlist
| contentstyle = text-align:left;
| content1style = text-align:center;

| content1     = [[MOSFET#Scaling|MOSFET scaling]]<br />([[List of semiconductor scale examples|process nodes]])
| content2     = <div style="padding-left:14px;">
* {{0}}[[20 μm process|20&nbsp;μm]]&nbsp;– 1968
* {{0}}[[10 μm process|10&nbsp;μm]]&nbsp;– 1971
* {{0|00}}[[6 μm process|6&nbsp;μm]]&nbsp;– 1974
* {{0|00}}[[3 μm process|3&nbsp;μm]]&nbsp;– 1977
* {{pad|0.05em}}[[1.5 μm process|1.5&nbsp;μm]]&nbsp;– 1981
* {{0|00}}[[1 μm process|1&nbsp;μm]]&nbsp;– 1984
* [[800 nm process|800&nbsp;nm]]&nbsp;– 1987
* [[600 nm process|600&nbsp;nm]]&nbsp;– 1990
* [[350 nm process|350&nbsp;nm]]&nbsp;– 1993
* [[250 nm process|250&nbsp;nm]]&nbsp;– 1996
* [[180 nm process|180&nbsp;nm]]&nbsp;– 1999
<!-- Do not add half-nodes such as 150nm half-shrink of 180nm -->
* [[130 nm process|130&nbsp;nm]]&nbsp;– 2001
<!-- Do not add half-nodes such as 110nm half-shrink of 130nm -->
* {{0}}[[90 nm process|90&nbsp;nm]]&nbsp;– 2003
<!-- Do not add half-nodes such as 80nm half-shrink of 90nm -->
* {{0}}[[65 nm process|65&nbsp;nm]]&nbsp;– 2005
<!-- Do not add half-nodes such as 55nm half-shrink of 65nm -->
* {{0}}[[45 nm process|45&nbsp;nm]]&nbsp;– 2007
<!-- Do not add half-nodes such as 40nm half-shrink of 45nm -->
* {{0}}[[32 nm process|32&nbsp;nm]]&nbsp;– 2009
* {{0}}[[28 nm process|28&nbsp;nm]]&nbsp;– 2010
* {{0}}[[22 nm process|22&nbsp;nm]]&nbsp;– 2012<!-- date must match the article. Put refs in article, not here-->
<!-- Do not add half-nodes such as 20nm half-shrink of 22nm -->
* {{0}}[[14 nm process|14&nbsp;nm]]&nbsp;– 2014<!-- date must match the article. Put refs in article, not here-->
* {{0}}[[10 nm process|10&nbsp;nm]]&nbsp;– 2016<!-- date must match the article. Put refs in article, not here-->
* {{0|00}}[[7 nm process|7&nbsp;nm]]&nbsp;– 2018<!--date must match the article. Put refs in article, not here-->
* {{0|00}}[[5 nm process|5&nbsp;nm]]&nbsp;– 2020<!--date must match the article. Put refs in article, not here-->
* {{0|00}}[[3 nm process|3&nbsp;nm]]&nbsp;– 2022<!--date must match the article. Put refs in article, not here-->
</div>

| content3     = <div style="padding-left:14px;">Future
* {{0|00}}[[2 nm process|2&nbsp;nm]]&nbsp;~ 2025<!--date must match the article. Put refs in article, not here-->
<!-- Do not add entries unless there is an article to support them. This template is intended as a way to navigate to Wikipedia articles on this subject. See Doc page.-->
</div>

| content4     = <div style="padding-right:5px; padding-left:5px;">{{hr}}{{pb}}
* [[Die shrink#Half-shrink|Half-nodes]]<!-- see comments above -->
* [[Transistor count#Transistor density|Density]]
* [[CMOS]]
* [[Semiconductor device|Device]] ([[Multigate device|multi-gate]])
* [[Moore's law]]
* [[Transistor count]]
* [[Semiconductor]]
* [[Semiconductor industry|Industry]]
* [[Nanoelectronics]]
</div>

| navbar       = none<!-- this template often gets well-meaning but poor edits -->
| below        = {{navbar|Semiconductor manufacturing processes|mini=1}}
| belowstyle   = padding-right: 0.5em; font-weight: normal; text-align: right; font-size: 115%
}}<noinclude>{{Documentation}}<!-- place category and language links on the /doc sub-page, not here --></noinclude>

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