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"High Dynamic Micro Vibrator with Integrated Optical Displacement Detector ..."

Yijia Du et al. (2018)

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DOI: 10.3390/S18072055

access: open

type: Journal Article

metadata version: 2023-12-28

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  - journals/sensors/DuYGWSQD18
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  - https://dblp.org/rec/journals/sensors/DuYGWSQD18
Yijia Du, Ting-Ting Yang, Dong-Dong Gong, Yi-Cheng Wang, Xiang-Yu Sun, Feng Qin, Gang Dai:
High Dynamic Micro Vibrator with Integrated Optical Displacement Detector for In-Situ Self-Calibration of MEMS Inertial Sensors. Sensors 18(7): 2055 (2018)

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