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"Simulation and optimization on the squeeze-film damping of a novel high-g ..."

Zunxian Yang, Xinxin Li (2006)

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DOI: 10.1016/J.MEJO.2005.07.005

access: closed

type: Journal Article

metadata version: 2023-09-30

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Zunxian Yang, Xinxin Li:
Simulation and optimization on the squeeze-film damping of a novel high-g accelerometer. Microelectron. J. 37(5): 383-387 (2006)

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