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"Realization of quartz MEMS accelerometer based on flip chip process."

Jinxing Liang et al. (2013)

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DOI: 10.1109/NEMS.2013.6559933

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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  - conf/nems/LiangCZS13
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  - https://dblp.org/rec/conf/nems/LiangCZS13
Jinxing Liang, Sujin Cui, Liyuan Zhang, Ancheng Shao:
Realization of quartz MEMS accelerometer based on flip chip process. NEMS 2013: 1194-1197

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