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"Design and simulation of polysilicon micro tuning fork for ultrasonic ..."

Germán Quiroz-Merino et al. (2015)

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DOI: 10.1109/ICEEE.2015.7357979

access: closed

type: Conference or Workshop Paper

metadata version: 2021-10-14

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Germán Quiroz-Merino, Rodolfo Sánchez-Fraga, Héctor Báez-Medina, Víctor Hugo Ponce Ponce, Salvador Mendoza-Acevedo:
Design and simulation of polysilicon micro tuning fork for ultrasonic frequency operation. CCE 2015: 1-5

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