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"Run-to-run control of DC-sputtering processes."

Denis Gillet, Oscar D. Crisalle, Dominique Bonvin (2001)

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DOI: 10.1109/ACC.2001.946035

access: closed

type: Conference or Workshop Paper

metadata version: 2022-01-05

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  dblp key:
  - conf/amcc/GilletCB01
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  - https://dblp.org/rec/conf/amcc/GilletCB01
Denis Gillet, Oscar D. Crisalle, Dominique Bonvin:
Run-to-run control of DC-sputtering processes. ACC 2001: 1997-2002

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