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"Sub-Micrometer Resolution Self-Displacement Sensing for Electromagnetic ..."

Xinxin Chang et al. (2024)

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DOI: 10.1109/TIE.2024.3376805

access: closed

type: Journal Article

metadata version: 2024-09-20

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Xinxin Chang, Zhengyan Wang, Yulian Peng, Houping Wu, Liansheng Zhang, Hongbo Wang:
Sub-Micrometer Resolution Self-Displacement Sensing for Electromagnetic Actuators. IEEE Trans. Ind. Electron. 71(11): 15169-15178 (2024)

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