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"Design, Fabrication and Characterization of a MEMS-Based Three-Dimensional ..."

Biyun Ling et al. (2018)

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DOI: 10.3390/S18030870

access: open

type: Journal Article

metadata version: 2024-06-18

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  - journals/sensors/LingPRCZLX18
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  - https://dblp.org/rec/journals/sensors/LingPRCZLX18
Biyun Ling, Chunrong Peng, Ren Ren, Zhaozhi Chu, Zhouwei Zhang, Hucheng Lei, Shanhong Xia:
Design, Fabrication and Characterization of a MEMS-Based Three-Dimensional Electric Field Sensor with Low Cross-Axis Coupling Interference. Sensors 18(3): 870 (2018)

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