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"An Integrated Microfabricated Chip with Double Functions as an Ion Source ..."
Hua Li et al. (2017)
- Hua Li, Linxiu Jiang, Chaoqun Guo, Jianmin Zhu, Yongrong Jiang, Zhencheng Chen:
An Integrated Microfabricated Chip with Double Functions as an Ion Source and Air Pump Based on LIGA Technology. Sensors 17(1): 87 (2017)
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