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"Direct measurement of residual stress in integrated circuit interconnect ..."

Alton B. Horsfall et al. (2003)

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DOI: 10.1016/S0026-2714(03)00306-8

access: closed

type: Journal Article

metadata version: 2024-07-20

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Alton B. Horsfall, Joyce M. M. dos Santos, S. M. Soare, Nicholas G. Wright, A. G. O'Neill, Steve J. Bull, Anthony J. Walton, Alan M. Gundlach, J. T. M. Stevenson:
Direct measurement of residual stress in integrated circuit interconnect features. Microelectron. Reliab. 43(9-11): 1797-1801 (2003)

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