default search action

combined dblp search
author search
venue search
publication search

ask others

"Defect cluster recognition system for fabricated semiconductor wafers."

Melanie Po-Leen Ooi et al. (2013)

> Home

Details and statistics

DOI: 10.1016/J.ENGAPPAI.2012.03.016

access: closed

type: Journal Article

metadata version: 2022-10-02

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - journals/eaai/OoiSKDC13
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/eaai/OoiSKDC13
Melanie Po-Leen Ooi, Hong Kuan Sok, Ye Chow Kuang, Serge N. Demidenko, Chris Chan:
Defect cluster recognition system for fabricated semiconductor wafers. Eng. Appl. Artif. Intell. 26(3): 1029-1043 (2013)

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.