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"Improved adhesion between C-MEMS and substrate by micromechanical ..."

Jie Gong et al. (2009)

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DOI: 10.1109/NEMS.2009.5068658

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-23

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  - conf/nems/GongTSLNL09
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  persistent URL:
  - https://dblp.org/rec/conf/nems/GongTSLNL09
Jie Gong, Zirong Tang, Tielin Shi, Guanglan Liao, Lei Nie, Shiyuan Liu:
Improved adhesion between C-MEMS and substrate by micromechanical interlocking. NEMS 2009: 624-627

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