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"Evolution of mechanical property of nanocomposite TiSiN films using ..."

Chen-Kuei Chung et al. (2010)

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DOI: 10.1109/NEMS.2010.5592231

access: closed

type: Conference or Workshop Paper

metadata version: 2020-10-28

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Chen-Kuei Chung, J. J. Jhu, S. C. Chang, B. H. Wu:
Evolution of mechanical property of nanocomposite TiSiN films using reactive magnetron cosputtering. NEMS 2010: 344-347

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