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"Controller design and optimal tuning of a wafer handling robot."

Xiaowen Yu et al. (2015)

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DOI: 10.1109/COASE.2015.7294150

access: closed

type: Conference or Workshop Paper

metadata version: 2021-05-20

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  - conf/case/YuWZT15
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Xiaowen Yu, Cong Wang, Yu Zhao, Masayoshi Tomizuka:
Controller design and optimal tuning of a wafer handling robot. CASE 2015: 640-646

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