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"Design Considerations and Fabrication Challenges of Surface Electrode Ion ..."

Jing Tao et al. (2019)

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DOI: 10.1109/3DIC48104.2019.9058780

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-30

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  dblp key:
  - conf/3dic/TaoLZLAT19
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  - https://dblp.org/rec/conf/3dic/TaoLZLAT19
Jing Tao, Hongyu Li, Peng Zhao, Yu Dian Lim, Anak Agung Alit Apriyana, Chuan Seng Tan:
Design Considerations and Fabrication Challenges of Surface Electrode Ion Trap with TSV Integration. 3DIC 2019: 1-5

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