Monolithic microfabricated valves and pumps by multilayer soft lithography (Q41728801)
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scientific article published on April 2000
Language | Label | Description | Also known as |
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English | Monolithic microfabricated valves and pumps by multilayer soft lithography |
scientific article published on April 2000 |
Statements
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Monolithic microfabricated valves and pumps by multilayer soft lithography (English)
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Unger MA
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Chou HP
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Thorsen T
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Scherer A
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Quake SR
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1 April 2000
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288
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5463
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113-116
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Identifiers
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