Atomic Layer Deposition to Fine-Tune the Surface Properties and Diameters of Fabricated Nanopores (Q41520967)
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scientific article published on June 2004
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Atomic Layer Deposition to Fine-Tune the Surface Properties and Diameters of Fabricated Nanopores |
scientific article published on June 2004 |
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Atomic Layer Deposition to Fine-Tune the Surface Properties and Diameters of Fabricated Nanopores (English)
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Peng Chen
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Toshiyuki Mitsui
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Damon B Farmer
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Jene Golovchenko
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Roy G Gordon
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1 June 2004
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1333-1337
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