Rapid vapor deposition of highly conformal silica nanolaminates (Q44177310)
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scientific article published in October 2002
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Rapid vapor deposition of highly conformal silica nanolaminates |
scientific article published in October 2002 |
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Rapid vapor deposition of highly conformal silica nanolaminates (English)
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Dennis Hausmann
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Jill Becker
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Shenglong Wang
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Roy G Gordon
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1 October 2002
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298
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5592
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402-406
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Identifiers
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