Observation of three-dimensional elemental distributions of a Si device using a 360 degrees -tilt FIB and the cold field-emission STEM system (Q33361849)

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English	Observation of three-dimensional elemental distributions of a Si device using a 360 degrees -tilt FIB and the cold field-emission STEM system	scientific article

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scholarly article

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Europe PubMed Central

PubMed publication ID

26 July 2017

Observation of three-dimensional elemental distributions of a Si device using a 360 degrees -tilt FIB and the cold field-emission STEM system (English)

1 reference

Europe PubMed Central

PubMed publication ID

26 July 2017

author name string

Toshie Yaguchi

1

1 reference

Europe PubMed Central

PubMed publication ID

26 July 2017

Mitsuru Konno

2

1 reference

Europe PubMed Central

PubMed publication ID

26 July 2017

Takeo Kamino

3

1 reference

Europe PubMed Central

PubMed publication ID

26 July 2017

Masashi Watanabe

4

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Europe PubMed Central

PubMed publication ID

26 July 2017

publication date

25 June 2008

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Europe PubMed Central

PubMed publication ID

26 July 2017

number of pages

13

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based on heuristic

inferred from page(s)

Ultramicroscopy

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Europe PubMed Central

PubMed publication ID

26 July 2017

108

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Europe PubMed Central

PubMed publication ID

26 July 2017

12

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Europe PubMed Central

PubMed publication ID

26 July 2017

1603-1615

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Europe PubMed Central

PubMed publication ID

26 July 2017

A method for multidirectional TEM observation of a specific site at atomic resolution

1 reference

https://api.crossref.org/works/10.1016%2FJ.ULTRAMIC.2008.06.003

7 January 2021

Application of a FIB-STEM system for 3D observation of a resin-embedded yeast cell

1 reference

https://api.crossref.org/works/10.1016%2FJ.ULTRAMIC.2008.06.003

7 January 2021

Recent advances in electron tomography: TEM and HAADF-STEM tomography for materials science and semiconductor applications.

1 reference

https://api.crossref.org/works/10.1016%2FJ.ULTRAMIC.2008.06.003

7 January 2021

3D electron microscopy in the physical sciences: the development of Z-contrast and EFTEM tomography

1 reference

https://api.crossref.org/works/10.1016%2FJ.ULTRAMIC.2008.06.003

7 January 2021

Spectroscopic electron tomography

1 reference

https://api.crossref.org/works/10.1016%2FJ.ULTRAMIC.2008.06.003

7 January 2021

Extending energy-filtered transmission electron microscopy (EFTEM) into three dimensions using electron tomography

1 reference

https://api.crossref.org/works/10.1016%2FJ.ULTRAMIC.2008.06.003

7 January 2021

Embedded nanostructures revealed in three dimensions

1 reference

https://api.crossref.org/works/10.1016%2FJ.ULTRAMIC.2008.06.003

7 January 2021

Iterative methods for the three-dimensional reconstruction of an object from projections

1 reference

https://api.crossref.org/works/10.1016%2FJ.ULTRAMIC.2008.06.003

7 January 2021

The reconstruction of a three-dimensional structure from projections and its application to electron microscopy. II. Direct methods.

1 reference

https://api.crossref.org/works/10.1016%2FJ.ULTRAMIC.2008.06.003

7 January 2021

EELS elemental mapping with unconventional methods. I. Theoretical basis: image analysis with multivariate statistics and entropy concepts

1 reference

https://api.crossref.org/works/10.1016%2FJ.ULTRAMIC.2008.06.003

7 January 2021

Automated analysis of SEM X-ray spectral images: a powerful new microanalysis tool

1 reference

https://api.crossref.org/works/10.1016%2FJ.ULTRAMIC.2008.06.003

7 January 2021

Tomographic Spectral Imaging with Multivariate Statistical Analysis: Comprehensive 3D Microanalysis

1 reference

https://api.crossref.org/works/10.1016%2FJ.ULTRAMIC.2008.06.003

7 January 2021

Application of multivariate statistical analysis to STEM X-ray spectral images: interfacial analysis in microelectronics

1 reference

https://api.crossref.org/works/10.1016%2FJ.ULTRAMIC.2008.06.003

7 January 2021

Mapping chemical and bonding information using multivariate analysis of electron energy-loss spectrum images.

1 reference

https://api.crossref.org/works/10.1016%2FJ.ULTRAMIC.2008.06.003

7 January 2021

Transmission electron microtomography without the "missing wedge" for quantitative structural analysis

1 reference

https://api.crossref.org/works/10.1016%2FJ.ULTRAMIC.2008.06.003

7 January 2021

Identifiers

10.1016/J.ULTRAMIC.2008.06.003

1 reference

Europe PubMed Central

PubMed publication ID

26 July 2017

PubMed publication ID

1 reference

Europe PubMed Central

PubMed publication ID

26 July 2017

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